Study on Error Analysis and Data Processing of Axisymmetric Aspheric Surface Measurement

摘要

Aiming at the system error in the measurement of aspheric workpiece, this paper analyzes the influence of error factors upon form accuracy and develops the right mathematical model of system error to solve the problem. With the help of computer technology, error theory and data processing method, software is developed to do data processing. By experiment, measure an available aspheric workpiece, and then process the measured data with error compensation method. The result shows that the method to remove measurement error is effective.