Experimental Study on Removal Rate of Hard-Brittle Materials in Ultrasonic Vibration Lapping

摘要

In this paper, the ultrasonic vibration lapping principle is introduced, the acoustic model of ultrasonic vibrating lapping is proposed, and the movement of abrasive particles in ultrasonic lapping with different vibration models is analyzed. Otherwise, the material removal rate with different lapping parameters and different vibration models are presented, and the conclusion is put forward that in ultrasonic lapping with different vibration models the material removal rate is about 1～4 times of that in conventional lapping, the changing tendency of material removal rate is different with different lapping parameters in ultrasonic and conventional lapping, and the influence of oilstone grit and generator power on material removal rate is major.