Evaluation of CVD diamond coating using back-reflected Rayleigh surface wave

摘要

The propagation characteristics of the back-reflected Rayleigh surface wave in chemical vapor deposit (CVD) diamond coated specimens were investigated experimentally using the ultrasonic backward radiation measurement. The deliberated delaminations produced between the coating layer and the substrate decreased Rayleigh surface wave velocity. This initial experimental result obtained in the present study demonstrates the high potential of the backward radiated ultrasound as a tool for nondestructive evaluation of very thin CVD diamond coating layer.