Ultrahigh resolution photonic crystal nanoprobe for high-density optical data storage, near-field microscopy, and nanolithography systems

摘要

In this paper we present the implementation, optimization and commercialization of an ultra-high resolution nano-probe in near field scanning optical microscopy/ spectroscopy (SNOM), nanolithography and high density optical data storage. The theme underlying this effort is the ability to examine or be able to write and/or read ultra fine feature sizes using near field based nano probes. The reason for pursing such research lies in the opportunities it offers for extending the applications of conventional optical microscopy into the nano meter scale domain. Furthermore near-field optical imaging preserves the inherent polarizing, non-invasive, spectroscopic and high temporal resolving capabilities of conventional microscopy, which are absent from other high-resolution techniques.