Performance of a high-stroke, segmented MEMS deformable-mirror technology

摘要

This paper presents a MEMS DM that is a hybrid of surface micromachining and bulk micromachining. The combination of fabrication techniques resulted in a DM that has demonstrated 7.6 μm stroke at 125 V, 98.6% fill factor, and excellent optical quality of better than 16 nm rms after packaging. Preliminary cyclic testing over 110 hours and 10~7 cycles showed no noticeable changes to the actuator positions after cycling.