Measurements of conductivity of thin metal films at microwave frequencies

摘要

TE011 mode cavity method is presented for the surface resistance and conductivity measurements of thin metal films deposited on dielectric substrates. Rigorous solutions of multilateral metal-dielectric resonator structure are given that allow to determine surface resistance and conductivity from measured Q-factors and resonant frequencies of the structure. Measurements of several thin films have been performed at frequencies 9 GHz and 17 GHz