METHOD OF CONTROLLING ELECTRIC CONDUCTIVITY OF METAL OXIDE THIN FILM AND THIN FILM TRANSISTOR INCLUDING THE METAL OXIDE THIN FILM HAVING THE CONTROLLED ELECTRIC CONDUCTIVITY

摘要

A method for improving electrical conductivity of a metal oxide thin film is disclosed. The electrical conductivity of the metal oxide thin film can be improved by heat treating the metal oxide thin film and then doping the metal oxide thin film with hydrogen by irradiating the metal oxide thin film with ultraviolet rays in an atmosphere containing water molecules and oxygen molecules. According to this method, the electrical conductivity of the metal oxide thin film can be improved permanently without lowering the transparency.;