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Developing Pulse Phase Thermography as a Characterisation Tool for Grossly Sculpted Surfaces

机译:开发脉冲相热成像作为严重雕刻表面的表征工具

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This paper presents the capabilities of a novel direct-writing electron-beam (EB) process and describes some initial work to develop pulse phase thermography (PPT) as a surface characterisation tool for geometrical features sculpted by this process. A concise review of existing rough surface characterisation techniques found no commonly accepted surface characterisation method for such grossly textured surfaces. Consequently, the potential of existing thermal technology and in particular PPT is explored in the context of developing a methodology to characterise the EB sculpted surface features. Initial tests using PPT on blind holes with various depths to simulate gross surface features are reported and used to determine the feasibility of this method for surface feature recognition and measurement. The paper also outlines proposals to extend PPT for protrusions and pits of different heights and depths measurements as a novel step forward to develop a sophisticated quality assessment (QA) tool. Scanning electron microscopy (SEM) and micro computed tomography (CT) are used as a reference to assess the accuracy of the three-dimensional surface topographical results obtained by PPT.
机译:本文介绍了一种新型直接写入电子束(EB)过程的能力,并描述了将脉冲相热成像(PPT)开发的一些初始工作作为该过程雕刻的几何特征的表面特征工具。对现有粗糙表面表征技术的简要审查发现了这种纹理表面的通常接受的表面表征方法。因此,在开发一种表征EB雕刻表面特征的方法的背景下探讨了现有热技术和特定PPT的潜力。报告使用PPT在具有各种深度模拟总表面特征的盲孔上的初始测试,并用于确定该方法对表面特征识别和测量方法的可行性。本文还概述了向不同高度的突起和凹坑扩展PPT的建议,以及深度测量作为新颖的阶跃,以开发复杂的质量评估(QA)工具。扫描电子显微镜(SEM)和微计算机断层扫描(CT)用作评估PPT获得的三维表面地形结果的准确性的参考。

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