A New Corrosion-Free, Permanent Epoxy Resist for MEMS and WLP Applications - (PPT)

机译：用于MEMS和WLP应用的一种新的无腐蚀，永久环氧抵抗 - （PPT）

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

We have described a new corrosion-free epoxy resist, PerMX 3000. The physical properties and process parameters for the new resist have been presented. Useful in wafer level cavity packaging applications or related MEMS packaging applications. Successful integration into a SAW filter package and a CMOS image sensor package has been demonstrated.

机译：我们描述了一种新的无腐蚀环氧抗蚀剂，PERMX 3000。已经介绍了新抗蚀剂的物理性质和工艺参数。用于晶圆级腔包装应用或相关的MEMS包装应用。已经证明了成功集成到SAW过滤器包和CMOS图像传感器包中。

著录项

来源
《International Conference and Exhibition on Device Packaging》|2008年||共22页
会议地点
作者
Donald W. Johnson; Hidetaka Uno; Wen Dai; Pedro Jorge;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类 TN405.94-53;
关键词

相似文献

外文文献
中文文献
专利

1. Study of the Radio Frequency (RF) performance of a Wafer-Level Package (WLP) with Through Silicon Vias (TSVs) for the integration of RF-MEMS and micromachined waveguides in the context of 5G and Internet of Things (IoT) applications: Part 1-validation of the 3D modelling approach [J] . Iannacci J. Microsystem technologies . 2020,第12期

机译：通过硅通孔（TSV）的晶片级封装（WLP）的射频（RF）性能研究RF-MEMS和微机械波导在5G和物联网（物联网）的情况下集成（IOT）应用：部分 1验证3D建模方法
2. Integration of Thick-Film Permanent Magnets for MEMS Applications [J] . Nathan Jackson, Francisco Javier Pedrosa, Alberto Bollero, Journal of Microelectromechanical Systems . 2016,第4期

机译：集成用于MEMS应用的厚膜永磁体
3. Integrated CoPtP Permanent Magnets for MEMS Electromagnetic Energy Harvesting Applications [J] . Dhiman Mallick, Saibal Roy Journal of Physics: Conference Series . 2016,第1期

机译：适用于MEMS电磁能量收集应用的集成式CoPtP永磁体
4. A New Corrosion-Free, Permanent Epoxy Resist for MEMS and WLP Applications - (PPT) [C] . Donald W. Johnson, Hidetaka Uno, Wen Dai, International Conference and Exhibition on Device Packaging . 2008

机译：用于MEMS和WLP应用的一种新的无腐蚀，永久环氧抵抗 - （PPT）
5. Micromachined permanent magnets and their MEMS applications. [D] . Cho, Hyoung Jin. 2002

机译：微机械永磁体及其MEMS应用。
6. Shock-Resistibility of MEMS-Based Inertial Microswitch under Reverse Directional Ultra-High g Acceleration for IoT Applications [O] . Qiu Xu, Zhuoqing Yang, Yunna Sun, -1

机译：反向超高g加速度下基于MEMS的惯性微动开关的抗震性
7. Prestressing Concrete with CFRP Composites for Sustainability and Corrosion-Free Applications [O] . A. Belarbi, M. Reda, P. Poudel, 2018

机译：具有CFRP复合材料的预应力混凝土可持续性和无腐蚀应用

A New Corrosion-Free, Permanent Epoxy Resist for MEMS and WLP Applications - (PPT)

摘要

著录项

相似文献

相关主题

期刊订阅