Multiphysics Modeling and Simulation for a MEMS Thermal-Mechanical Switch

摘要

This paper presents FEA modeling and simulation results including thermal-electric-structural multiphysics contact phenomenon for a MEMS thermal-mechanical DC switch. Switch-on time and thermal time constants have been calculated both in vacuum and in air. Results show that higher heater driving voltage would provide faster switch-on time. For a heater voltage range of 1.0V～3.0V, switch-on time ranges from 0.18ms to 0.022ms in vacuum, while it ranges much longer, 2.9ms to 0.17ms, in air due to damping effect. Thermal time constant is calculated as about 2ms in vacuum, and about 0.2ms in air due to faster heat dissipation through air conduction. Thermal time constant also reduces slightly as thermal conductivity of the contact surface pairs increases.