Deposition of C/BN Multilayer Films and Their Characterization

摘要

Diamond-like carbon (DLC) is a metastable amorphous film that exhibits unique properties such as chemical inertness, high hardness, low friction coefficient and high wear resistance [1]. Boron nitride (BN) is also an important material with its unique properties such as low friction coefficient, excellent thermal stability and chemical inertness against oxygen and ferrous materials even at high temperatures [2]. Thus, these films are commonly applied in the protective coatings of cutting tools, thermal and electronic devices. In this article, the morphological and mechanical properties of nanoscale multilayer (C/BN)_n films were investigated.