ABNORMALITY DETECTION DEVICE FOR THIN FILM DEPOSITION DEVICE AND ABNORMALITY DETECTION METHOD FOR THIN FILM DEPOSITION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an abnormality detection device for a thin film deposition device and an abnormality detection method for the thin film deposition apparatus that can detect abnormality of the thin film deposition device in a stage before a thin film is actually deposited on a substrate.;SOLUTION: The present invention relates to an abnormality detection device 100 for detecting abnormality of a thin film deposition device 10 which deposits a thin film by a vapor-phase growth method on a substrate installed in a vacuum container 30 while placing an operation part 21 in operation, and the abnormality detection device 100 comprises an acquisition part 111 for acquiring predetermined state data based upon the operation of the operation part 21, and a determination part 112 which determines whether the thin film deposition device 10 is abnormal by contrasting a feature quantity based upon the predetermined state data with a preset threshold, the determination part 112 determining whether the thin film deposition device 10 is abnormal before the thin film deposition device 10 begins to deposit the thin film. The determination part 112 uses, as the feature quantity, a Mahalanobis distanced based upon the predetermined state data.;SELECTED DRAWING: Figure 1;COPYRIGHT: (C)2018,JPO&INPIT