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Integration of Thin-Film Galfenol with MEMS Cantilevers for Magnetic Actuation

机译:用MEMS悬臂的薄膜加仑酚与MEMS悬臂相结合

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Galfenol (a family of Fe-Ga alloys) has been shown to have excellent magnetostriction, while maintaining mechanical properties similar to Fe.[1] Galfenol is more resistant to corrosion than Fe, is magnetically soft, and has a relatively low cost. [2] In addition to its mechanical properties, Galfenol's other advantage over Terfenol-D (currently the most popular magnetostrictive material) is that magnetostriction can be obtained even at low applied magnetic fields due to a high magnetic permeability. [3] Therefore, Galfenol can be used for applications such as microelectromechanical systems, sensors and actuators. Therefore, thin films of Galfenol are beginning to attract attention.
机译:加仑酚(一家Fe-Ga合金)已被证明具有优异的磁致伸缩,同时保持与Fe类似的机械性能。[1]加芬酚比Fe更耐腐蚀,磁性柔软,具有相对较低的成本。 [2]除了其机械性能之外,加利福酚还在Terfenol-D上(目前最流行的磁致伸缩材料)的其他优点是即使在低施加的磁场上也可以获得磁致伸缩,这是由于高磁导率。因此,加苯酚可用于微机电系统,传感器和致动器等应用。因此,加仑酚的薄膜开始引起注意。

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