During the last few years, the feasibility of various electromagnetic and electrodynamic linear microactuators has been proven [1,2]. A major issue in the development and successful implementation of such linear microactuators is friction, since the vertical forces generated by these type of motors are about one order of magnitude greater than the lateral driving forces. Thus slide guides turned out to be not practical, even if very low friction values could be achieved through optimized tribological coatings like diamond like carbon [3]. To resolve this issue, a combined tribological and magnetic levitation approach is suggested.
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