This abstract presents a novel micro-machined magnetic deflector for controlling electron beam deflection in an electron beam microcolumn system (EBMS). Research on miniaturized EBMS has drawn many interests in recent years because of its wide applications in various fields, such as E-beam nano-lithography, portable electron microscope, micro-CRT (cathode-ray tube), and biomedical instruments [1][2]. Electron beam deflection or scanning is one of important factors influencing the ultimate performance of an electron beam microcolumn system. Traditionally, there are two kinds of mechanisms employed in EBMS to control the electron beam deflection. They are electrostatic deflector and magnetic deflector, respectively. Compared to electrostatic deflector, magnetic deflector has much lower aberrations. Using micro-fabricated magnetic deflector can largely improve the scan linearity, field, speed, and meanwhile reduce the size and fabrication cost of EBMS.
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