MEMS-based ZnO Piezoelectric Tactile Sensor for Minimally Invasive Surgery

摘要

This paper reports the design and fabrication of a MEMS-based ZnO piezoelectric tactile sensor, which can be integrated on to the endoscopic grasper used in minimally invasive surgery (MIS). The sensor includes a silicon substrate, platinum bottom electrode, platinum top electrode, and a ZnO piezoelectric thin film, which is sandwiched between the two-electrode layers. The sensitivity of the micro-force sensor is analyzed in theory and the sensor exhibits high sensitivity about 7 pc/uN. The application of this tactile sensor to MIS will allow the surgeon feeling the touch force between the endoscopic grasper and tissue in real-time, and manipulating the tissue safely.