IMPACT OF HYDROSTATIC PRESSURE DURING ANNEALING OF Si:O ON CREATION OF SIMOX - LIKE STRUCTURES

机译：Si的退火期间静压压力的影响：o创造Simox样结构

获取原文

页面导航

摘要
著录项
相似文献
相关主题

摘要

The new and earlier reported results on the effect of hydrostatic pressure (HP, up to 1.23 GPa) and annealing at ≤ 1570 K of oxygen implanted silicon (Si:O) are discussed. HP affects the misfit at the SiO_x/Si boundary, solubility and diffusivity of oxygen, the number and dimensions of SiO_x precipitates.

机译：讨论了新的和更早的报告结果讨论了静水压力（HP，高达1.23GPa）和退火的氧气注入硅（Si：O）的效果。 HP影响SiO_X / Si边界，溶解性和氧气扩散性的错配，SiO_x沉淀物的数量和尺寸。

著录项

来源
《NATO Advanced Research Workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment》|2005年||共6页
会议地点
作者
A.Misiuk; J.Ratajczak; J.Katcki; I.V.Antonova; NATO;
展开▼
作者单位

展开▼
会议组织
原文格式 PDF
正文语种
中图分类半导体技术;
关键词
silicon; oxygen; implantation; hydrostatic pressure; annealing;

机译：硅;氧气;植入;静压压力;退火;

相似文献

外文文献
中文文献
专利

1. The impact of the stacking fault energy of nanostructured metals on phenomena during annealing at the high hydrostatic pressure [J] . Agnieszka Teresa Krawczynska, Michael Kerber, Przemyslaw Suchecki, Materials Science and Engineering . 2021,第Mara18期

机译：纳米结构金属堆叠故障能量对高静压压力退火过程中的影响
2. Structures prepared by implantation of silicon with nitrogen and annealing under high hydrostatic pressure [J] . Rzodkiewicz W, Kudla A, Misiuk A, Materials science in semiconductor processing . 2004,第4a6期

机译：通过硅注入氮并在高静水压力下退火制备的结构
3. Impact of hydrostatic pressure applied at annealing on homogeneity of Si-Ge single crystals [J] . Misiuk A., Bak-Misiuk J., Surma B., Diffusion and Defect Data. Solid State Data, Part B. Solid State Phenomena . 2011,第Null期

机译：退火时施加的静水压力对Si-Ge单晶均匀性的影响
4. IMPACT OF HYDROSTATIC PRESSURE DURING ANNEALING OF Si:O ON CREATION OF SIMOX - LIKE STRUCTURES [C] . A.Misiuk, J.Ratajczak, J.Katcki, NATO Advanced Research Workshop on Science and Technology of Semiconductor-On-Insulator Structures and Devices Operating in a Harsh Environment . 2005

机译：Si的退火期间静压压力的影响：o创造Simox样结构
5. Addressing Sodium Reduction and Pathogen Internalization in Non-Intact Whole Muscle Beef: Evaluation of Dehydrated Collagen and Hydrostatic Pressure as Impact Technologies. [D] . Lowder, Austin Cole. 2013

机译：解决完整牛肉中的钠还原和病原体内在化：脱水胶原蛋白和静水压力作为冲击技术的评估。
6. Impact of Hydrostatic Pressure on an Intrinsically Disordered Protein: A High-Pressure NMR Study of α-Synuclein [O] . Julien Roche, Jinfa Ying, Alexander S. Maltsev, -1

机译：静水压力对固有紊乱蛋白质的影响：α-突触核蛋白的高压NMR研究
7. The comparison of grain boundaries in a nanostructured austenitic stainless steel annealed conventionally and under high hydrostatic pressure [O] . Agnieszka Krawczynska, Stanisław Gierlotka, Bogdan Palosz, 2016

机译：纳米结构奥氏体不锈钢中的晶界比较常规和高静压压力下退火
8. Enhancement of Grain Refined Microstructure in a Nanostructured Metals via Ultrahigh Pressure Hydrostatic Consolidation Process - Construction of Master Sintering Curve (MSC) and Its Application to Densification of Al-Mg Alloy [R] . Lee, S. 2010

机译：超高压静水固结法增强纳米金属晶粒细化组织 - 主烧结曲线（msC）的构建及其在al-mg合金致密化中的应用

IMPACT OF HYDROSTATIC PRESSURE DURING ANNEALING OF Si:O ON CREATION OF SIMOX - LIKE STRUCTURES

摘要

著录项

相似文献

相关主题

期刊订阅