STRUCTURE AND TRIBOLOGICAL PROPERTIES OF NICKEL/CARBON NANOCOMPOSITE FILMS FORMED BY MICROWAVE PLASMA-ASSISTED DEPOSITION TECHNIQUE

摘要

The structure and tribological properties of Ni/a-C:H nanocomposite films formed bymicrowave plasma-assisted deposition technique were investigated as functions of the acetylene concentration in Ar-C_(2)H_(2) gas mixtures of various compositions. The lowest friction coefficient and wear were obtained from Ni/a-C:H amorphous nanocomposite films containing 20 percent sp3 bonds deposited in the gas mixtures containing 60 percent of C_(2)H_(2).