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HEAT AND MASS TRANSFER IN A CVD OPTICAL FIBER COATING PROCESS BY PROPANE PRECURSOR GAS

机译:通过丙烷前体气体的CVD光纤涂布过程中的热量和传质

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This study investigates the chemical vapor deposition (CVD) process used to hermetically coat optical fibers during draw using propane as the precursor gas. Temperature is calculated by coupling radiation and convection heat transfer from the reactor walls and gas flow with a radially-lumped conduction heat transfer model for the moving optical fiber. Multi-component species diffusion is modeled by the Dixon-Lewis method, which is based on the molecular theory for ideal gases. Gas-phase reaction kinetics is modeled using a 3-step gas phase chemical kinetics mechanism. Surface reaction kinetics is described using collision theory in which a sticking coefficient is used as an empirical parameter to predict surface reactions. A parameter study is carried out with various optical fiber inlet temperature and drawing speed, and validated with experiment results.
机译:本研究研究了使用丙烷作为前体气体的绘制过程中用于气密涂覆光纤的化学气相沉积(CVD)工艺。通过从反应器壁的辐射和对流热传递和具有用于移动光纤的径向扩散传热模型的辐射和对流热传递来计算温度。多组分物种扩散由Dixon-Lewis方法建模,基于理想气体的分子理论。使用3步气相化学动力学机制模拟气相反应动力学。使用碰撞理论描述表面反应动力学,其中粘附系数用作预测表面反应的经验参数。参数研究采用各种光纤入口温度和拉伸速度进行,并验证了实验结果。

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