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Integrated tracking and focusing systems in a monolithic device for MEMS optical pick-up head

机译：用于MEMS光学拾取头的单片装置中的集成跟踪和聚焦系统

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《IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference》|2005年||共2页
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Mingching Wu; Chih-Yu Peng; Sheng-Yi Hsiao; Hung-Yi Lin; Weileun Fang;
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中图分类自动化技术、计算机技术;
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专利

1. Integrated bi-directional focusing and tracking actuators in a monolithic device for a MEMS optical pick-up head [J] . Wu MC, Fang WL Journal of Micromechanics and Microengineering . 2006,第7期

机译：用于MEMS光学头的单片设备中的集成双向聚焦和跟踪致动器
2. Integrated Tracking and Focusing Systems of MEMS Optical Pickup Head [J] . Cheng H.-D., Hsiao S.-Y., Wu M., IEEE Transactions on Magnetics . 2007,第期

机译：MEMS光学头的集成跟踪和聚焦系统
3. Development of tracking and focusing micro actuators for dual-stage optical pick-up head [J] . Wu MC, Hsiao SY, Peng CY, Journal of optics, A. Pure and applied optics: journal of the European Optical Society . 2006,第7期

机译：用于双级光学头的跟踪和聚焦微型致动器的开发
4. Integrated tracking and focusing systems in a monolithic device for MEMS optical pick-up head [C] . Mingching Wu, Chih-Yu Peng, Sheng-Yi Hsiao, . 2005

机译：用于MEMS光学头的单片设备中的集成跟踪和聚焦系统
5. Dynamic focus-tracking MEMS scanning micromirror for an endoscopic, optical coherence tomography based imaging system. [D] . Strathman, Matthew. 2014

机译：动态聚焦跟踪MEMS扫描微镜，用于基于内窥镜，光学相干断层扫描的成像系统。
6. Devices Based on Co-Integrated MEMS Actuators and Optical Waveguide: A Review [O] . Franck Chollet 2016

机译：基于共集成MEMS执行器和光波导的器件：综述
7. Integrated Tracking and Focusing Systems of MEMS Optical Pickup Head [O] . Hao-der Cheng, Sheng-yi Hsiao, Mingching Wu, 2015

机译：mEms光学拾取头的集成跟踪和聚焦系统
8. SPICE Level 3 and BSIM3v3.1 characterization of monolithic integrated CMOS- MEMS devices [R] . Staple, B. D. , Watts, H. A. , Dyck, C. , 1998

机译：单片集成CmOs-mEms器件的spICE Level 3和BsIm3 v3.1特性

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