A novel cylindrical ultrasonic linear micro actuator (CULMA) with bi-directional motion is presented. The CULMA is composed of a stator and slider. The stator consists of a PZT tube and an elastic material, which is a thin film metallic glass (TFMG) pipe. The TFMG pipe with an expansion region in the middle is fabricated on the PZT tube, which is polarized in the radial (r) direction, as shown in Fig. 1. The PZT tube vibrates based on the converse piezoelectric effect under a high frequency harmonic voltage applied on the inner and outer electrodes of the PZT tube. At some specific frequency and under suitable boundary conditions, a traveling wave is generated on the TFMG pipe to drive the slider, which is a stainless pipe with high precision, to move in two directions by changing the voltage signal.
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