Development of the Cylindrical Ultrasonic Linear Microactuator

摘要

A novel ultrasonic linear microactuator with bi-directional motion is presented. The microactuator is composed of the compact structure of the cylindrical stator and slider. The basic principle is based on the traveling wave propagation generated on the stator, which is investigated by using the finite element method software. In the experiment, the driving frequency is 613 kHz, and the maximum velocity is about 25 mm/s at the voltage of 30 V. This kind device is promising to make the stable performance microactuator with higher energy efficiency.