MEMS for micro-optics

摘要

Advances in the MEMS field have led to the development of a wide variety of technologies which are also of considerable utility in micro-optics. Microfabrication techniques using silicon, polymers, metals and other materials as well as approaches for assembly and integration developed for mechanical, electrical and fluidic microsystems are employed for a wide variety of optical microsystems. As a result, micro-optical components have become important elements in complex micro- and nano-systems, requiring interdisciplinary engineering to fully realize their potential.