MICRO-OPTIC DEVICE WITH MEANS FOR PRECISELY POSITIONING MICRO-OPTIC COMPONENTS

摘要

The invention concerns a device whereby micro-optic parts, particularlythose that tend to tilt because of their geometric dimensions, can be preciselyarranged on a support. The device according to the invention comprises a support(TR) on which several guide elements (FE1...FE4) are placed in cutouts(A1...A4). The arrangement of the guide elements (FE1...FE4) is such that themicro-optic part (BT) to be positioned can be inserted between the guide elements(FE1...FE4). In this way an active adjustment is not required. In a particularlyadvantageous embodiment of the invention, the guide elements (FE1...FE4) touchthe micro-optic part (BT) at points that are located at different distances from thesurface of the support (TR). In this way tilting is prevented in a particularlyeffective manner. The support (TR) is made of a silicon substrate for example;the guide elements (FE1...FE4) can be uncoated spherical lenses which are placedin cutouts etched into the substrate by means of wet chemical methods.