EFFECT OF A COMPOSITION ALLY GRADED LAYER ON THE TRIBOLOGICAL PROPERTIES OF DIAMOND-LIKE CARBON FILMS

摘要

Diamond-like carbon (DLC) films have good properties such as high hardness, low friction coefficient and high corrosion resistance. However, the bonding-durability of DLC films with substrates is often weak due to their high internal stress. In this research, a compositionally graded layer as an interlayer between the DLC film and a Ti-alloy substrate was prepared by an ionization deposition method [1,2] in order to improve the wear resistance and the adhesion. The feature of this compositionally graded layer is a silicon and carbon compound with decreasing carbon/silicon atomic ratio to the substrate. The tribological properties of the DLC based double-layer film were evaluated by a ball-on-disk test. The chemical bonding and composition of the compositionally graded film were evaluated with an X-ray photoelectron spectrometer (XPS).