Microstructure and Mechanical Properties of Cr-C-N, Cr-Si-N and Cr-Si-C-N Coatings by a Hybrid Coating System

摘要

CrN-based multi-component coatings were deposited by a hybrid coating system combining the arc ion plating (AIP) and sputtering technique. In this work, comparative studies on microstructure and mechanical properties of microhardness and wear behaviors among Cr-C-N, Cr-Si-N, and Cr-Si-C-N coatings were systematically conducted. Adding carbon and silicon atoms into CrN coatings had large effects on microstructural change and mechanical properties of CrN coatings. The hardness value of Cr-Si-C-N coatings showed about 44 GPa, while those of Cr-Si-N and Cr-C-N coatings were 34 and 23 GPa, respectively. The average friction coefficient of CrN-based coatings decreased from 0.65 to 0.4 with the incorporation of silicon and carbon content.