Preparation of ternary alloy libraries by means of thick film deposition and interdiffusion: structure and mechanical properties

摘要

A method of preparing ternary alloy libraries for combinatorial materials development based on thick film deposition and interdiffusion was studied, using the Ni-Fe-Cr ternary system. Specimens were prepared by depositing films onto sapphire substrates with an e-beam evaporation system followed by annealing in a vacuum for interdiffusion. The specimens were examined using cross sectional scanning electron microscopy (SEM) with energy dispersive spectroscopy (EDS), scanning Auger microanalysis (SAM), angular resolved x-ray fluorescence (AR-XRF), x-ray diffraction (XRD), and nanoindentation. The method proved an effective way to make the alloy libraries for screening mechanical properties by means of nanoindentation.