We developed a scanning microwave microscope (S|.LM) designed for characterizing local electric properties at low temperatures. A high-Q V4coaxial cavity was used as a sensor probe, which can detect the cliange of quality factor due to the tip-sample interaction with enough accuracy. From the measurements of combinatorial samples, it was demonstrated that this S).iM system has enough performance for high-throughput characterization of sample conductance under variable temperature conditions.
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