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Photonic band engineering in opals by growth of Si/Ge multilayer shells

机译:通过Si / GE多层壳生长的蛋白石的光子带工程

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The optimization of the procedure to grow accurate amounts of amorphous silicon and germanium by chemical vapor deposition (CVD) free of contamination in opals has been performed. The samples have been optically characterized and results agree with theoretical calculations of band structures. Multilayer systems of both semiconductors have been fabricated. Samples have been optically characterized and observed with a scanning electron microscope. Selective removal of germanium with aqua regia has proven to be possible. Theoretical calculations show that subtle variations of the topography may give rise to important effects (flat bands, pseudogap openings, etc). As an example, a photonic band structure with a complete photonic band gap between the 5th and 6th band has been provided along with a method to obtain it. It would be impossible to discuss all the possible structures that could be obtained from samples with different number of layers and materials forming them. However, there are many interesting topographies that could be fabricated in a relatively straightforward manner following the techniques described here.
机译:已经进行了通过化学气相沉积(CVD)在蛋白石中,通过化学气相沉积(CVD)的精确量的方法优化。样品已经光学表征,结果与带结构的理论计算结果一致。两种半导体的多层系统已经制造。用扫描电子显微镜光学表征和观察样品。已证实可以获得与Aqua Regia的选择性去除锗。理论计算表明,地形的微妙变化可能导致重要效果(平带,伪焦点开口等)。作为示例,已经提供了具有第5和第6频带之间完整光子带隙的光子带结构以及获得它的方法。讨论从具有不同数量的层和形成它们的样品可以获得的所有可能结构是不可能的。然而,存在许多有趣的地形,其可以在这里描述的技术之后以相对简单的方式制造。

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