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A New Approach of an Oil-Chip Self-Test Concept for Micromachined Gyroscopes

机译:用于微机械陀螺仪的油芯片自检概念的新方法

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摘要

A new approach of a self-test and self-calibration concept for micro-machined gyroscopes is described and evaluated. An induced angular rate is applied by a reference system resulting to a Coriolis force. The resulting real 'inertial' response of the Coriolis Vibrating Gyroscope (CVG) can be used for implementation of self-test and recalibration routines. The shown concept is realized without any changes in silicon technology. Only a adequate larger die size is required compared to a standard gyroscope to implement the additional reference system. The invented reference system enables the compensation of errors and drifts during operation and life time arising in both, CVG mechanics as well as in electronics. Beyond that, an in-mission calibration can be applied under defined conditions for higher system accuracy and reliability. This paper describes in detail the concept, its modelling and the realization of this new approach. Finally, first measurement results demonstrate the feasibility of the new calibration concept.
机译:描述和评估了微机器陀螺仪的自检和自校准概念的新方法。通过参考系统施加诱导的角速率,从而导致科里奥利力。由此产生的Riolis振动陀螺仪(CVG)的真实'惯性'响应可用于实现自检和重新校准程序。所显示的概念在没有硅技术的任何变化的情况下实现。与标准陀螺仪相比,仅需要足够的较大的芯片尺寸来实现附加参考系统。本发明的参考系统能够补偿在CVG力学以及电子设备中产生的操作和寿命期间的误差和漂移。除此之外,可以在确定的条件下应用一项任务校准,以获得更高的系统精度和可靠性。本文详细介绍了这种新方法的概念,建模和实现。最后,首先测量结果表明了新校准概念的可行性。

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