Novel design and prototyping of a micro optical distance sensor considering a distributed fabrication

摘要

A novel design for a compact and robust micro optical distance sensor is presented. It is suitable for mass fabrication by micro molding known form the LIGA technique and automatic assembly. Due to a modular design approach a distributed fabrication of the device modules is currently implemented. This allows a separate fabrication of the modules at several manufacturers each one being an expert for the special technology needed to fabricate the module. During the design phase not only the optical specification of the sensor system but also all requirements given by the manufacturers, such as easy manufacturability with high throughput as well as defined interfaces need to be considered.