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Multi-beam interference model for predicting three-dimensional photonic crystal structures

机译:用于预测三维光子晶体结构的多光束干扰模型

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Photonic crystals (PCs) have been intensively investigated both theoretically and experimentally in recent years due to their possibility to manipulate and control light. A number of different methods have been proposed and demonstrated to fabricate two- or three-dimensional photonic crystal structures. Among them, the holographic lithography method, in which multi-beam interference is employed, offers a number of advantages, including its ability to create large volume of periodic structures through an irradiation process, the uniformity of period, and more degrees of freedom to control the structures. In this study, a multi-beam interference model is presented for predicting the three-dimensional photonic crystal structures. Various parameters, including beam propagation and polarization directions, beam intensities, and phase shifts are considered. Calculations have been carried out to simulate a four-beam configuration which has been popularly used in the fabrication of photonic crystals. It has been demonstrated that the contours of the interference pattern are related to the polarization states and the intensity ratios among the four beams. Therefore, by controlling the beam intensities and polarization directions, different structures can be obtained. The results presented in this study provide a useful guide for choosing various optical parameters and selecting proper photoresists to fabricate three-dimensional photonic crystals.
机译:由于它们可能性操纵和控制光,因此近年来,光子晶体(PCS)在理论上和实验上被密深。已经提出了许多不同的方法,并证明了制造了两个或三维光子晶体结构。其中,采用多光束干扰的全息光刻方法提供了许多优点,包括通过照射过程,周期均匀性和更高程度的控制自由度来产生大量的周期性结构的能力结构。在本研究中,提出了一种用于预测三维光子晶体结构的多光束干扰模型。考虑各种参数,包括光束传播和偏振方向,光束强度和相移。已经执行计算以模拟四梁构造,该四梁构造已经普遍用于光子晶体的制造。已经证明了干扰图案的轮廓与四光束之间的偏振状态和强度比相关。因此,通过控制光束强度和偏振方向,可以获得不同的结构。本研究中提出的结果提供了一种用于选择各种光学参数并选择适当的光致抗蚀剂以制造三维光子晶体的有用指南。

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