Integrated Micro Sensors and Systems

摘要

Our recent research on the integrated micro biosensor systems was presented in this paper. Monolithic ISFET (ion-sensitive field-effect transistor) pH sensor and microelectrode amperometric immunosensor based on the micro/nano fabrication technology were studied. The Monolithic ISFET sensor, including the differential ISFET/REFET sensing device and the signal-processing circuit integrated on a single chip, was fabricated by standard CMOS and MEMS technology. Amperometric immunosensors were prepared based on MEMS technology with different microelectrode system and novel antibody immobilization methods. Both kinds of the sensors show attractive advantages, such as miniaturization, compatibility with CMOS techniques, easy to be designed into micro array and enables relatively rapid, reliable and inexpensive field-analysis.