This contribution presents challenges to control the microstructure in nano-structured materials via a relatively new approach, i.e. using a so-called nanocluster source. An important aspect is that the cluster size distribution is monodisperse and that the kinetic energy of the clusters during deposition can be varied. Interestingly the clusters are grown in extreme non-equilibrium conditions, which allow obtaining metastable structures of metals and alloys. Because one avoids the effects of nucleation and growth on a specific substrate one may tailor the properties of the films by choosing the appropriate preparation conditions.
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