Lattice Based Microstructure Evolution Model for Monte Carlo Finite Element Analysis of Polycrystalline Materials

摘要

A method to extract mechanical properties of polycrystalline thin-films is proposed herein for Micro-Electro-Mechanical Systems(MEMS)components.The micro structural evolution of thin film deposition is considered to alleviate the size effects in experiments by employing a lattice based stochastic model.A stable numerical algorithm is described.The kinetics parameters,which are the key parameters for the microstructure evolution based on the nucleation and growth mechanism,are extracted from the given micrograph of a polycrystalline material by an inverse method.The proposed method is verified by comparing the quantitative measures;the number of grains and the grain size distribution,for the actual and simulated microstructures.Two dimensional mesh generation algorithm for the lattice based microstructure is developed and used to calculate the equivalent Young's modulus of several polycrystalline materials with anisotropic single crystals.