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Characterization of InGaAs self-mixing detectors for chirp, amplitude-modulated LADAR (CAML)

机译:啁啾,振幅调制LDAR(CAML)的InGaAs自混合探测器的表征

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InGaAs-based Metal Semiconductor Metal (MSM) Photodetectors were fabricated and tested as been used for photodetectors and Opto-electronic mixers. A comparison of various processing schemes for MSM InAlAs/InGaAs photodetectors on InP substrates was conducted to minimize the dark current. An InAlAs based Schottky Enhanced Layers (SEL) was employed on InGaAs MSM to enhance the barrier height to reduce the dark current. The effect of SEL thickness on the performance of OE mixer was studied. The experimental results were compared to those simulated with CFDRC software.
机译:基于IngaAs的金属半导体金属(MSM)光电探测器被制造和测试,用于光电探测器和光电搅拌机。进行了MSM Inalas / InGaAs光电探测器的各种处理方案的比较,以最小化暗电流。在InGaAs MSM上采用基于肖特基增强层(SEL)以增强阻挡高度以降低暗电流。研究了SEL厚度对OE混合器性能的影响。将实验结果与CFDRC软件模拟的那些进行了比较。

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