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Characterization of InGaAs self-mixing detectors for chirp, amplitude-modulated LADAR (CAML)

机译:用于chi调幅LADAR(CAML)的InGaAs自混合探测器的特性

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摘要

InGaAs-based Metal Semiconductor Metal (MSM) Photodetectors were fabricated and tested as been used for photodetectors and Opto-electronic mixers. A comparison of various processing schemes for MSM InAlAs/InGaAs photodetectors on InP substrates was conducted to minimize the dark current. An InAlAs based Schottky Enhanced Layers (SEL) was employed on InGaAs MSM to enhance the barrier height to reduce the dark current. The effect of SEL thickness on the performance of OE mixer was studied. The experimental results were compared to those simulated with CFDRC software.
机译:制作并测试了基于InGaAs的金属半导体金属(MSM)光电探测器,并将其用于光电探测器和光电混合器。比较了InP衬底上MSM InAlAs / InGaAs光电探测器的各种处理方案,以最大程度地减小暗电流。在InGaAs MSM上采用了基于InAlAs的肖特基增强层(SEL),以提高势垒高度以减少暗电流。研究了SEL厚度对OE混合器性能的影响。将实验结果与使用CFDRC软件模拟的结果进行了比较。

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