Surface plasmon resonance sensor with silicon-based prism coupling

摘要

We study possibilities of implementation of Surface Plasmon Resonance (SPR) sensors on purely silicon platform, in which SPR-supporting Au film is used with a silicon prism in the Kretschmann-Raether geometry. Based on theoretical and experimental analyses we have determined the conditions and parameters of SPR excitations on such a platform in the infrared light for configurations of bio- and gas sensing. The approach enables one to apply well-developed silicon microfabrication and integration methods for SPR technique, opening up the possibilities to miniaturize SPR bio- and chemical sensors.