MICRO-/POLY-CRYSTALLINE SILICON MATERIALS FOR THIN FILM PHOTOVOLTAIC DEVICES: PHYSICAL PROPERTIES

摘要

This paper discusses some of the physical properties of poly-Si films that determine their device performance. For a specific case, the compact poly-Si films grown by HWCVD at Utrecht University (UU) will be described. The causes for the naturally enhanced optical absorption of poly-Si, which makes it possible to use it as a thin film photovoltaic material, will be probed, as will the oxygen incorporation which creates donor states that have adverse effects on solar cell performance. It will be shown that extremely intrinsic poly-Si material can be made by HWCVD.