Surface Characterization of DLC Layers PVD Coated on AISI 52100 Steel Substrate

摘要

The purpose of this study is to evaluate the influence of substrate and layer deposition parameters on the morphology, topography and adhesion of the DLC layer. The carbonic layer was deposited on the rotary hook body made of AISI 52100 steel. Using the PVD magnetron sputtering technique, the deposition was performed at three different temperatures. Information about the coating was collected using optical, SEM and AFM microscopy and XRD. The DLC hardness and adhesion to substrate was determined. Comparing substrate hardness values, DLC adhesion and topography, it turned out that the best wear resistance was exhibited by the layers deposited at 180 °C.