Shape Memory Alloy Films Manufactured by Magnetron Sputtering

摘要

By transferring the functional properties from bulk alloys to thinner structures in the range of micrometers it becomes possible to manufacture devices that can be used in micro -opto-electro-mechanical systems. Shape memory alloy possess a wide range of functional properties among which the shape memory effect, superelasticity and the high damping are influenced by the martensitic transformation. The current paper shows the results obtained on manufacturing shape memory alloy films by magnetron sputtering and the analysis of the martensitic transformation in the films attached to the substrate.