3D measuring methods for visual inspection of advanced packages

摘要

The purpose of the work is an evaluation of existing 3D measuring methods for their applicability in sensors for the manufacturing process. Different 3D measuring methods with their special characteristics are discussed. To find suitable criteria for evaluation, the components are examined for their optical and geometrical characteristics. The custom-specific evaluation can be used at the development of 3D sensors to choose a suitable measuring method or to weigh up its advantages and disadvantages in the application.