Micro-system process for education: fabrication of a pressure sensor

摘要

Micro-systems technology is a fast developing field that takes advantage of the well established Si microelectronics technology. In this paper we present the concepts and process flow of the technological elaboration of a pressure sensor. This approach places the emphasis on the key technologies of micro-systems and includes the use of double face photolithography as well as bulk micro-machining. It also benefits of standard clean room equipment.