Improved silicon micromachined 3D mirror for acceleration sensing using an extrashort external-cavity laser self-mixing interferometer

摘要

We have designed a ne type of folding suspended polysilicon micro-mirror, integrating a new type of precision position- lock, a new compact design for the hinges and a bi- directional electrostatic actuator to bias the position of the mirror. The mirror is intended to be used in a very short external cavity laser configuration for acceleration/displacement sensing. An extensive theory has been built to guide the design and the fabrication of the sensor.