High-Voltage LiNi_(0.5)Mn_(1.5)O_4 Thin Film Cathode Prepared by RF Sputtering

摘要

Thin films of LiNi_(0.5)Mn_(1.5)O_4 were prepared on stainless steel substrates using reactive radio-frequency sputtering method. The crystallinity of the post-annealed films at different temperatures after deposition at room temperature was studied, using XRD. Electrochemical properties of LiNi_(0.5)Mn_(1.5)O_4 thin film cathodes were investigated using charge/discharge voltage curve against a lithium foil anode. The crystallinity and the electrochemical characteristics of post-annealed temperature are not consistent with each other. Among them, the best electrochemical characteristics were obtained at 600°C. To further analyze the reason, additional SIMS measurement was performed.