SELECTIVE ELECTROLESS VAPOR DEPOSITION OF CONDUCTIVE, CATALYTICALLY ACTIVE,HYDROUS RUTHENIUM OXIDE THIN FILMS

摘要

Ruthenium dioxide is a chemically diverse material used in numerous commercial applications.Anhydrous RuO_2 exhibits low-temperature stability and metallic conductivity on the order of 10~4 S centre dot cm~(-1),so it is used as a diffusion barrier and bottom electrode and in electronic components and as a low-temperature resistor.