An integrated chemical sensor array using carbon black polymers and a standard CMOS process

摘要

We have developed a new chemical sensor array by combining polymer-based chemiresistors with a standard integrated circuit technology. We fabricated an array of addressable chemical sensor sites in a CMOS process, and then performed a post-processing step of electroless gold to create sensor contacts. We create sensors by spraying a mixture of nonconductive polymers and carbon black particles onto the sensor sites. We demonstrate that an array of diverse chemical sensors can perform discrimination of odors.