Synthesis and Structural Characterizations of Vanadium Oxides Thin Films Prepared by MOCVD and ALD

摘要

There is growing interest in producing thin film lithium batteries for microelectronic applications.Vanadium oxides such as V_2O_5,V_6O_(13),...demonstrate interesting electrochemical performances as cathode thanks to its high specific energy density.V_2O_5 thin films can be deposited by several methods (sol-gel,sputtering,chemical vapor deposition,pulsed-laser deposition,flash evaporation,thermal evaporation and electron beam deposition).It was also shown recently (1-2) that V_2O_5 thin and well crystallized films can be obtained by ALD (Atomic Layer Deposition).