Amorphous Wire-CMOS IC Magneto-Impedance (MI) Micro Magnetic Sensor and Applications (Mobile Sensor Magnetics)

摘要

Recent development of the Amorphous Wire-CMOS IC MI micro magnetic sensor focusing the mobile phone motion sensor chips is presented. The motion sensor chip of 5.5×5.5×1.5 mm{sup}3 in size and 6 mW in power consumption is an integrated chip with a 3-axial geomagnetic field sensor having 3 amorphous wire heads of 0.6 mm length each with 10 nT resolution and a 2-axial acceleration sensor with two 0.6 mm long amorphous wires combining with a small magnet mounted beam each, in which the gravity acceleration sensing decides the absolute axis (the mobile phone body inclination angle for the horizon) of the 3 -axial electronic compass showing 1.0° resolution, while the dynamic acceleration sensor is assisted by the electronic compass when detecting the mobile phone body motion such as a hand-shake inputting. The 5-axis motion sensor chip which is the very first case of mass production of highly sensitive micro magnetic sensors for mobile phone device is a so-called the intelligent chip and is widely applicable to automobiles, robots and various automation systems with a concept of "Mobile Intelligent Magnetics."