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Mechanical Constraint and Loading on Ferroelectric Memory Capacitors

机译:铁电存储器电容器上的机械约束和装载

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The influence of mechanical constraint imposed by device geometry upon the switching response of a ferroelectric thin film memory capacitor is investigated. The memory capacitor was represented by two-dimensional ferroelectric islands of different aspect ratio, mechanically constrained by surrounding materials. Its ferroelectric non-linear behaviour was modeled by a crystal plasticity constitutive law and calculated using the finite element method. The switching response of the device, in terms of remnant charge storage, was determined as a function of geometry and constraint. The switching response under applied in-plane tensile stress and hydrostatic pressure was also studied experimentally. Our results showed that (1) the capacitor's aspect ratio could significantly affect the clamping behaviour and thus the remnant polarization, (2) it was possible to maximise the switching charge through the optimisation of the device geometry, and (3) it is possible to find a critical switching stress at zero electric field and a critical coercive field at zero residual stress.
机译:研究了装置几何体施加在铁电薄膜存储电容器的开关响应时施加的机械约束的影响。存储电容器由不同纵横比的二维铁电岛表示,通过周围材料机械约束。其铁电非线性行为由晶体塑性本构规定的建模并使用有限元方法计算。根据残余电荷存储器,该装置的切换响应被确定为几何和约束的函数。还在实验上研究了平面内拉伸应力和静压压力下的开关响应。我们的结果表明,(1)电容器的纵横比可能会显着影响钳位行为,因此可以通过器件几何优化来最大化开关电荷,(3)在零剩余应力下找到零电场的临界开关应力和临界矫顽磁场。

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